Fabrication of planar blazed grating using laser LIGA

Chi Feng Chen, Rui Ting Zheng, Bor Hong Yao

Research output: Contribution to journalConference articlepeer-review


We study the design of planar micro-grating and propose a new approach to fabricate planar micro-grating. By the basic grating diffractive theory (rigorous coupled wave theory), suitable and optimized structure (within our manufacturing capabilities) of grating for our application is found. The fabrication of planar micro-grating is demonstrated by Laser LIGA technology, using the instrument of KrF (248 nm) excimer laser system. The micro-grating with the continuous smooth profile and the pitch 2.5 μ m is shown.

Original languageEnglish
Pages (from-to)229-236
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2002
EventAPOC 2002: Optical Switching and Optical Interconnection II - Shanghai, China
Duration: 16 Oct 200218 Oct 2002


  • Excimer laser
  • Laser LIGA
  • Micro-grating
  • Rigorous coupled wave theory
  • Spectral resolution


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