Fabrication of planar blazed grating using laser LIGA

Chi Feng Chen; Rui Ting Zheng; Bor Hong Yao

doi:10.1117/12.482276

Fabrication of planar blazed grating using laser LIGA

Chi Feng Chen, Rui Ting Zheng, Bor Hong Yao

Department of Mechanical Engineering

Research output: Contribution to journal › Conference article › peer-review

Abstract

We study the design of planar micro-grating and propose a new approach to fabricate planar micro-grating. By the basic grating diffractive theory (rigorous coupled wave theory), suitable and optimized structure (within our manufacturing capabilities) of grating for our application is found. The fabrication of planar micro-grating is demonstrated by Laser LIGA technology, using the instrument of KrF (248 nm) excimer laser system. The micro-grating with the continuous smooth profile and the pitch 2.5 μ m is shown.

Original language	English
Pages (from-to)	229-236
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4907
DOIs	https://doi.org/10.1117/12.482276
State	Published - 2002
Event	APOC 2002: Optical Switching and Optical Interconnection II - Shanghai, China Duration: 16 Oct 2002 → 18 Oct 2002

Keywords

Excimer laser
Laser LIGA
Micro-grating
Rigorous coupled wave theory
Spectral resolution

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10.1117/12.482276

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title = "Fabrication of planar blazed grating using laser LIGA",

abstract = "We study the design of planar micro-grating and propose a new approach to fabricate planar micro-grating. By the basic grating diffractive theory (rigorous coupled wave theory), suitable and optimized structure (within our manufacturing capabilities) of grating for our application is found. The fabrication of planar micro-grating is demonstrated by Laser LIGA technology, using the instrument of KrF (248 nm) excimer laser system. The micro-grating with the continuous smooth profile and the pitch 2.5 μ m is shown.",

keywords = "Excimer laser, Laser LIGA, Micro-grating, Rigorous coupled wave theory, Spectral resolution",

author = "Chen, {Chi Feng} and Zheng, {Rui Ting} and Yao, {Bor Hong}",

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TY - JOUR

T1 - Fabrication of planar blazed grating using laser LIGA

AU - Chen, Chi Feng

AU - Zheng, Rui Ting

AU - Yao, Bor Hong

PY - 2002

Y1 - 2002

N2 - We study the design of planar micro-grating and propose a new approach to fabricate planar micro-grating. By the basic grating diffractive theory (rigorous coupled wave theory), suitable and optimized structure (within our manufacturing capabilities) of grating for our application is found. The fabrication of planar micro-grating is demonstrated by Laser LIGA technology, using the instrument of KrF (248 nm) excimer laser system. The micro-grating with the continuous smooth profile and the pitch 2.5 μ m is shown.

AB - We study the design of planar micro-grating and propose a new approach to fabricate planar micro-grating. By the basic grating diffractive theory (rigorous coupled wave theory), suitable and optimized structure (within our manufacturing capabilities) of grating for our application is found. The fabrication of planar micro-grating is demonstrated by Laser LIGA technology, using the instrument of KrF (248 nm) excimer laser system. The micro-grating with the continuous smooth profile and the pitch 2.5 μ m is shown.

KW - Excimer laser

KW - Laser LIGA

KW - Micro-grating

KW - Rigorous coupled wave theory

KW - Spectral resolution

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U2 - 10.1117/12.482276

DO - 10.1117/12.482276

M3 - 會議論文

AN - SCOPUS:0036454954

SN - 0277-786X

VL - 4907

SP - 229

EP - 236

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - APOC 2002: Optical Switching and Optical Interconnection II

Y2 - 16 October 2002 through 18 October 2002

ER -

Fabrication of planar blazed grating using laser LIGA

Abstract

Keywords

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