Fabrication of hydrogenated microcrystalline silicon thin films using RF magnetron sputtering

Hsuan Wen Wang, Wei Ning Su, Chia Wei Han, Sheng Hui Chen, Cheng Chung Lee

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Fingerprint

Dive into the research topics of 'Fabrication of hydrogenated microcrystalline silicon thin films using RF magnetron sputtering'. Together they form a unique fingerprint.

Mathematics

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds