Fabrication of high-NA GaN diffractive microlenses

Chii Chang Chen; Ming Hung Li; Chih Yang Chang; Gou Chung Chi; Jenq Yang Chang; Wei Tai Cheng; Jui Hung Yeh; Chuck Wu

doi:10.1109/OMEMS.2002.1031446

Fabrication of high-NA GaN diffractive microlenses

Chii Chang Chen, Ming Hung Li, Chih Yang Chang, Gou Chung Chi, Jenq Yang Chang, Wei Tai Cheng, Jui Hung Yeh, Chuck Wu

Department of Optics and Photonics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Abstract

We present the fabrication of the high-numerical-aperture GaN diffractive microlenses by gray-level mask and inductively coupled plasma etching. (NA=0.85) The microlenses were designed for the application of high-density optical data storage. The advantage of using GaN as the material of the diffractive microlenses is discussed.

Original language	English
Title of host publication	2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	67-68
Number of pages	2
ISBN (Electronic)	0780375955, 9780780375956
DOIs	https://doi.org/10.1109/OMEMS.2002.1031446
State	Published - 2002
Event	IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Lugano, Switzerland Duration: 20 Aug 2002 → 23 Aug 2002

Publication series

Name	2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Conference

Conference	IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002
Country/Territory	Switzerland
City	Lugano
Period	20/08/02 → 23/08/02

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10.1109/OMEMS.2002.1031446

Cite this

Chen, C. C., Li, M. H., Chang, C. Y., Chi, G. C., Chang, J. Y., Cheng, W. T., Yeh, J. H., & Wu, C. (2002). Fabrication of high-NA GaN diffractive microlenses. In 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest (pp. 67-68). Article 1031446 (2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/OMEMS.2002.1031446

@inproceedings{4c77ebdfce264973a0f2df8a084b98b5,

title = "Fabrication of high-NA GaN diffractive microlenses",

abstract = "We present the fabrication of the high-numerical-aperture GaN diffractive microlenses by gray-level mask and inductively coupled plasma etching. (NA=0.85) The microlenses were designed for the application of high-density optical data storage. The advantage of using GaN as the material of the diffractive microlenses is discussed.",

author = "Chen, {Chii Chang} and Li, {Ming Hung} and Chang, {Chih Yang} and Chi, {Gou Chung} and Chang, {Jenq Yang} and Cheng, {Wei Tai} and Yeh, {Jui Hung} and Chuck Wu",

note = "Publisher Copyright: {\textcopyright} 2002 IEEE.; IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 ; Conference date: 20-08-2002 Through 23-08-2002",

year = "2002",

doi = "10.1109/OMEMS.2002.1031446",

language = "???core.languages.en_GB???",

series = "2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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booktitle = "2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest",

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Chen, CC, Li, MH, Chang, CY, Chi, GC, Chang, JY, Cheng, WT, Yeh, JH & Wu, C 2002, Fabrication of high-NA GaN diffractive microlenses. in 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest., 1031446, 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest, Institute of Electrical and Electronics Engineers Inc., pp. 67-68, IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002, Lugano, Switzerland, 20/08/02. https://doi.org/10.1109/OMEMS.2002.1031446

Fabrication of high-NA GaN diffractive microlenses. / Chen, Chii Chang; Li, Ming Hung; Chang, Chih Yang et al.
2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest. Institute of Electrical and Electronics Engineers Inc., 2002. p. 67-68 1031446 (2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Fabrication of high-NA GaN diffractive microlenses

AU - Chen, Chii Chang

AU - Li, Ming Hung

AU - Chang, Chih Yang

AU - Chi, Gou Chung

AU - Chang, Jenq Yang

AU - Cheng, Wei Tai

AU - Yeh, Jui Hung

AU - Wu, Chuck

PY - 2002

Y1 - 2002

N2 - We present the fabrication of the high-numerical-aperture GaN diffractive microlenses by gray-level mask and inductively coupled plasma etching. (NA=0.85) The microlenses were designed for the application of high-density optical data storage. The advantage of using GaN as the material of the diffractive microlenses is discussed.

AB - We present the fabrication of the high-numerical-aperture GaN diffractive microlenses by gray-level mask and inductively coupled plasma etching. (NA=0.85) The microlenses were designed for the application of high-density optical data storage. The advantage of using GaN as the material of the diffractive microlenses is discussed.

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DO - 10.1109/OMEMS.2002.1031446

M3 - 會議論文篇章

AN - SCOPUS:84963720625

T3 - 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

SP - 67

EP - 68

BT - 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002

Y2 - 20 August 2002 through 23 August 2002

ER -

Chen CC, Li MH, Chang CY, Chi GC, Chang JY, Cheng WT et al. Fabrication of high-NA GaN diffractive microlenses. In 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest. Institute of Electrical and Electronics Engineers Inc. 2002. p. 67-68. 1031446. (2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest). doi: 10.1109/OMEMS.2002.1031446

Fabrication of high-NA GaN diffractive microlenses

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