@inproceedings{7e92009b6364492484514a1c4aa5a31f,
title = "Fabrication of diffractive optical lens for beam splitting using LIGA process",
abstract = "A LIGA process to fabricate the eight-level diffractive optical lens array for beam splitting is presented. The pattern of diffractive optical lens with two focal points is designed with an optimal rotation-angle method and realized through silicon etching, nickel electroplated and hot embossing process. Fabrication errors resulted from complex kinoform structure and micrometer-range feature size are taken care by Tetraethoxysilane oxide etching and special designed de-mold techniques so that high quality diffractive optical lens can be fabricated. A PMMA-based diffractive optical lens is measured to confirm the optical properties. Comparing the measurement results and the simulation results, it is found that a PMMA-based diffractive optical lens with excellent optical properties are obtained. The diffraction efficiency error is only 5.19% and the uniformity error is 1.52%.",
keywords = "Beam splitting, Diffraction efficiency, Diffraction microlens, Hot embossing, LIGA fabrication",
author = "Yang, {Jauh Jung} and Liao, {Yun Shiuan} and Chen, {Chi Feng}",
year = "2006",
doi = "10.1109/ICMA.2006.257804",
language = "???core.languages.en_GB???",
isbn = "1424404665",
series = "2006 IEEE International Conference on Mechatronics and Automation, ICMA 2006",
pages = "1242--1247",
booktitle = "2006 IEEE International Conference on Mechatronics and Automation, ICMA 2006",
note = "2006 IEEE International Conference on Mechatronics and Automation, ICMA 2006 ; Conference date: 25-06-2006 Through 28-06-2006",
}