@inproceedings{4583c8470cb34794991dc02924171201,
title = "Fabrication of dense wavelength division multiplexing filters with large useful area",
abstract = "Dense Wavelength Division Multiplexers (DWDM), a kind of narrow band-pass filter, are extremely sensitive to the optical thickness error in each composite layer. Therefore to have a large useful coating area is extreme difficult because of the uniformity problem. To enlarge the useful coating area it is necessary to improve their design and their fabrication. In this study, we discuss how the tooling factors at different positions and for different materials are related to the optical performance of the design. 100GHz DWDM filters were fabricated by E-gun evaporation with ion-assisted deposition (IAD). To improve the coating uniformity, an analysis technique called shaping tooling factor (STF) was used to analyze the deviation of the optical thickness in different materials so as to enlarge the useful coating area. Also a technique of etching the deposited layers with oxygen ions was introduced. When the above techniques were applied in the fabrication of 100 GHz DWDM filters, the uniformity was better than +/-0.002% over an area of 72 mm in diameter and better than +/-0.0006% over 20mm in diameter.",
keywords = "DWDM filter, Etching effect, Film thickness, Ion assisted deposition, Shaping tooling factor, Uniformity",
author = "Lee, {Cheng Chung} and Chen, {Sheng Hui} and Hsu, {Jin Cherng} and Kuo, {Chien Cheng}",
year = "2006",
doi = "10.1117/12.678915",
language = "???core.languages.en_GB???",
isbn = "0819463655",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Advances in Thin-Film Coatings for Optical Applications III",
note = "Advances in Thin-Film Coatings for Optical Applications III ; Conference date: 13-08-2006 Through 14-08-2006",
}