Fabrication of curved structures with electron-beam and surface structure characterization

Jem Kun Chen, Fu Hsiang Ko, Hsuan Ko Chen, Cheng Tung Chou, Hsuen Li Chen, Feng Chih Chang

Research output: Contribution to journalArticlepeer-review

7 Scopus citations
Original languageEnglish
Pages (from-to)492-500
Number of pages9
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Issue number2
StatePublished - 2004

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