FABRICATION OF BIOMEDICAL SENSORS USING THIN AND THICK FILM MICROELECTRONIC TECHNOLOGY.

Michael R. Neuman, Chung Chiun Liu

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

Thin and thick film microelectronic technology has been applied to the design and fabrication of physical and chemical sensors for various biomedical applications. Examples of some of these are presented. Advantages of this technology to specific biomedical applications are pointed out. Biosensors can be divided into two general categories: sensors of chemical variables and sensors of physical variables. We look at examples of each of these.

Original languageEnglish
Title of host publicationStudies in Electrical and Electronic Engineering
EditorsClifford D. Fung, Peter W. Cheung, Wen H. Ko, David G. Fleming
PublisherElsevier
Pages225-238
Number of pages14
ISBN (Print)0444425608
StatePublished - 1985

Publication series

NameStudies in Electrical and Electronic Engineering
Volume20
ISSN (Print)0167-403X

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