Fabrication of autocloned photonic crystals by using electron-beam gun with ion-assisted deposition

Te Hung Chang, Sheng Hui Chen, Chien Cheng Kuo, Cheng Chung Lee

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


Autocloning technique is an attractive deposition method to make photonic crystals since it can produce various photonic crystals by changing the substrate periodicity and the structure of the stacking materials. We report a novel method to fabricate autocloned photonic crystals. This method has better step-coverage, higher deposition rate and large deposition area than the sputtering method. We successfully preserved the periodic surface corrugation after the deposition of multilayer stacks by using an E-beam gun evaporation with ion-assisted deposition (IAD). Freedoms of the shaping process can be controlled by the power of IAD and the time of the ion source etching. The ion source etching is a physical etching process without any chemical reaction and dangerously reactive gas. The process parameters were described in this paper. During the deposition process, the refractive index can be adjusted by changing the deposition rate and the substrate temperature. The deposition rate was about 0.7-1 nm/s for SiO2 which is almost ten times faster than the sputtering method. So this method is good for the mass production of photonic crystals.

Original languageEnglish
Title of host publicationNanoengineering
Subtitle of host publicationFabrication, Properties, Optics, and Devices III
StatePublished - 2006
EventNanoengineering: Fabrication, Properties, Optics, and Devices III - San Diego, CA, United States
Duration: 15 Aug 200617 Aug 2006

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


ConferenceNanoengineering: Fabrication, Properties, Optics, and Devices III
Country/TerritoryUnited States
CitySan Diego, CA


  • Autocloning
  • Ion-assisted deposition
  • Photonic crystal
  • Thin-film


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