Fabrication of an electro-thermal micro-gripper with elliptical cross-sections using silver-nickel composite ink

Yao Yun Feng, Shih Jui Chen, Ping Hsun Hsieh, Wen Ting Chu

Research output: Contribution to journalArticlepeer-review

19 Scopus citations

Abstract

This paper proposes a rapid fabrication process for miniaturized electro-thermal grippers by using silver-nickel composite ink. Thick resistive structures are dispensed on a silicon wafer by a dispenser, and the parameters of the dispenser can be controlled for different thicknesses of hot and cold arms in a micro-gripper. The fabricated single layer structures are almost symmetric about a central plane of symmetry, thus largely suppressing the out-of-plane deflection. Due to cross-sectional area difference of the cold and hot arms, the micro-gripper can be driven by applying dc voltages. Electrical and mechanical behaviors of the micro-grippers are simulated and tested, and the simulation results are in accordance with the experiment results. The simulated maximum temperature is 155 °C, and occurs at the hot arms with an input voltage of 1.54 V. The measured displacement of the micro-gripper is observed to be 311 μm for an applied current of 0.26 A with maximum power dissipation of 0.4 W. The fabricated micro-gripper can grip a small styrofoam ball with a diameter of 1.3 mm between both tips.

Original languageEnglish
Pages (from-to)106-112
Number of pages7
JournalSensors and Actuators, A: Physical
Volume245
DOIs
StatePublished - 1 Jul 2016

Keywords

  • Electro-thermal actuator
  • Elliptical cross-section
  • Micro-gripper
  • Silver-nickel ink

Fingerprint

Dive into the research topics of 'Fabrication of an electro-thermal micro-gripper with elliptical cross-sections using silver-nickel composite ink'. Together they form a unique fingerprint.

Cite this