Fabrication of a nanoscale single-crystalline silicon thin film on insulator

Keyphrases

• Pyrex 100%
• Wafer 100%
• Insulator 100%
• Polysilicon 100%
• Sacrificial Layer 100%
• Multicrystalline Silicon 100%
• Crystalline Silicon Thin Film 100%
• Hybrid Method 50%
• Transmission Electron Microscopy 50%
• Oxides 50%
• Nanostructured Materials 50%
• Wafer Bonding 50%
• Device Wafer 50%
• Microwave Hybrid 50%
• Implantable Devices 50%
• Silicon Layer 50%
• Sandwich Structure 50%
• Hydrogen Ion 50%
• Exfoliating 50%
• One-dimensional Nanostructures 50%
• Structure Layer 50%

Engineering

• Thin Films 100%
• Nanoscale 100%
• Crystalline Silicon 100%
• Polysilicon 100%
• Nanomaterial 50%
• Hybrid Method 50%
• One Dimensional 50%
• Wafer Bonding 50%
• Device Wafer 50%
• Silicon Layer 50%
• Implanted Device 50%
• Silicon Oxide 50%
• Sandwich Structures 50%

Material Science

• Silicon 100%
• Thin Films 100%
• Oxide Compound 33%
• Transmission Electron Microscopy 33%
• Single Crystal 33%
• Nanostructure 33%