Fabrication of 0.25 μm T-Gate AlInGaN/AlN/GaN HEMTs by I-Line Optical Lithography

Yi Zhen Liu, Wei Chih Ho, Indraneel Sanyal, Jen Inn Chyi

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

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Engineering & Materials Science

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