Fabrication and tolerance reduction of a Si-based pickup module for optical storage

Keyphrases

• Optical Data Storage 100%
• Si-based 100%
• Spot Size 100%
• Full Width at Half Maximum 50%
• Optical Element 50%
• Optical Module 50%
• Light Source 50%
• Si Substrate 50%
• Visible Spectrum 50%
• Diffraction Limit 50%
• Ray Tracing 50%
• System Technology 50%
• Focus Spot 50%
• Micro-opto-electro-mechanical Systems (MOEMS) 50%
• Optical Phase 50%
• Infrared Range 50%
• Diffractive Optics 50%
• Optical Signal 50%
• Optic Disc 50%
• Phase Element 50%
• Self-alignment 50%
• Numerical Aperture 50%
• Optical Storage Systems 50%
• Assembled System 50%
• Zero-order Beam 50%
• Optical Operation 50%

Physics

• Light Source 100%
• Optical Communication 100%
• Numerical Aperture 100%
• Optical Disk 100%
• Self Alignment 100%