Fabrication and characterization of ferroelectric varactors for tunable wireless front-ends

Yi Chun Lee, Yu Chi Lin, Wei Chih Chen, Jia Shiang Fu

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations


Using a tunable wireless front-end is a competitive solution for implementing multistandard radios. To realize tunable wireless front-ends, varactors are indispensible building blocks. Ferroelectric varactors, offering high tunability, low bias voltage, high power handling capability, good quality factor, fast tuning speed, and low cost, are suitable for making tunable microwave circuits. In this paper, we present our work on the fabrication and characterization of the ferroelectric varactors based on RF-sputtered BST thin films. Both MIM and interdigitated capacitors are fabricated and characterized. The measurement results of the MIM structure show that 45% variation in capacitance can be obtained with a bias voltage of 10 V. For the interdigitated varactor, capacitance variation of 20% and leakage current lower than 30 nA are observed under a 50-V bias. The maximum quality factor of the interdigitated varactor measured at 500 MHz is above 10.

Original languageEnglish
Title of host publication2010 Asia-Pacific Microwave Conference Proceedings, APMC 2010
Number of pages4
StatePublished - 2010
Event2010 Asia-Pacific Microwave Conference, APMC 2010 - Yokohama, Japan
Duration: 7 Dec 201010 Dec 2010

Publication series

NameAsia-Pacific Microwave Conference Proceedings, APMC


Conference2010 Asia-Pacific Microwave Conference, APMC 2010


  • Ferroelectric capacitors
  • tunable circuits and devices
  • varactors


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