Fabricating low-loss hollow optical waveguides via amorphous silicon bonding using dilute KOH solvent

Shih Shou Lo; Hua Kung Chiu; Chii Chang Chen; Shih Chieh Hsu; Cheng Yi Liu

doi:10.1109/LPT.2005.859137

Fabricating low-loss hollow optical waveguides via amorphous silicon bonding using dilute KOH solvent

Shih Shou Lo, Hua Kung Chiu, Chii Chang Chen, Shih Chieh Hsu, Cheng Yi Liu

Research output: Contribution to journal › Article › peer-review

10 Scopus citations

Abstract

This work explicates a method for fabricating a hollow optical waveguide. Dilute KOH solvent was used to bond two omni-directional reflector (ODR) Si wafers to an amorphous Si thin film on the top of a Si wafer. The resultant bonding interface is very thin, with a thickness that is close to that of a SiO₂ layer in the ODR substrate. Therefore, the far field image reveals that light is strongly confined in the hollow optical waveguide.

Original language	English
Pages (from-to)	2592-2594
Number of pages	3
Journal	IEEE Photonics Technology Letters
Volume	17
Issue number	12
DOIs	https://doi.org/10.1109/LPT.2005.859137
State	Published - Dec 2005

Keywords

Bonding
Hollow
Optical waveguide
Wafer bonding

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10.1109/LPT.2005.859137

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abstract = "This work explicates a method for fabricating a hollow optical waveguide. Dilute KOH solvent was used to bond two omni-directional reflector (ODR) Si wafers to an amorphous Si thin film on the top of a Si wafer. The resultant bonding interface is very thin, with a thickness that is close to that of a SiO2 layer in the ODR substrate. Therefore, the far field image reveals that light is strongly confined in the hollow optical waveguide.",

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AU - Lo, Shih Shou

AU - Chiu, Hua Kung

AU - Chen, Chii Chang

AU - Hsu, Shih Chieh

AU - Liu, Cheng Yi

PY - 2005/12

Y1 - 2005/12

N2 - This work explicates a method for fabricating a hollow optical waveguide. Dilute KOH solvent was used to bond two omni-directional reflector (ODR) Si wafers to an amorphous Si thin film on the top of a Si wafer. The resultant bonding interface is very thin, with a thickness that is close to that of a SiO2 layer in the ODR substrate. Therefore, the far field image reveals that light is strongly confined in the hollow optical waveguide.

AB - This work explicates a method for fabricating a hollow optical waveguide. Dilute KOH solvent was used to bond two omni-directional reflector (ODR) Si wafers to an amorphous Si thin film on the top of a Si wafer. The resultant bonding interface is very thin, with a thickness that is close to that of a SiO2 layer in the ODR substrate. Therefore, the far field image reveals that light is strongly confined in the hollow optical waveguide.

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JO - IEEE Photonics Technology Letters

JF - IEEE Photonics Technology Letters

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Fabricating low-loss hollow optical waveguides via amorphous silicon bonding using dilute KOH solvent

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Keywords

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