Fabricating a silicon microlens mold by ICP dry etching

R. L. Chen; C. M. Wang; J. Y. Chang

doi:10.1109/CLEOPR.2003.1277112

Fabricating a silicon microlens mold by ICP dry etching

R. L. Chen, C. M. Wang, J. Y. Chang

Department of Optics and Photonics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

In this paper, a silicon mold, with spherical/aspherical concave microlens arrays, was made by using ICP dry etching technique. A PMMA microlens was molded by using this mold and then tested by SEM, Dektakprofiler and etc.

Original language	English
Title of host publication	CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics
Subtitle of host publication	Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	565
Number of pages	1
ISBN (Electronic)	0780377664
DOIs	https://doi.org/10.1109/CLEOPR.2003.1277112
State	Published - 2003
Event	5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 - Taipei, Taiwan Duration: 15 Dec 2003 → 19 Dec 2003

Publication series

Name	Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
Volume	2

Conference

Conference	5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003
Country/Territory	Taiwan
City	Taipei
Period	15/12/03 → 19/12/03

Keywords

Dry-etching
Microlens array
Mold process

Access to Document

10.1109/CLEOPR.2003.1277112

Cite this

Chen, R. L., Wang, C. M., & Chang, J. Y. (2003). Fabricating a silicon microlens mold by ICP dry etching. In CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings (pp. 565). Article 1277112 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; Vol. 2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CLEOPR.2003.1277112

Chen, R. L. ; Wang, C. M. ; Chang, J. Y. / Fabricating a silicon microlens mold by ICP dry etching. CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2003. pp. 565 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).

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title = "Fabricating a silicon microlens mold by ICP dry etching",

abstract = "In this paper, a silicon mold, with spherical/aspherical concave microlens arrays, was made by using ICP dry etching technique. A PMMA microlens was molded by using this mold and then tested by SEM, Dektakprofiler and etc.",

keywords = "Dry-etching, Microlens array, Mold process",

author = "Chen, {R. L.} and Wang, {C. M.} and Chang, {J. Y.}",

note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 ; Conference date: 15-12-2003 Through 19-12-2003",

year = "2003",

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series = "Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest",

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Chen, RL, Wang, CM & Chang, JY 2003, Fabricating a silicon microlens mold by ICP dry etching. in CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings., 1277112, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, vol. 2, Institute of Electrical and Electronics Engineers Inc., pp. 565, 5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003, Taipei, Taiwan, 15/12/03. https://doi.org/10.1109/CLEOPR.2003.1277112

Fabricating a silicon microlens mold by ICP dry etching. / Chen, R. L.; Wang, C. M.; Chang, J. Y.
CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2003. p. 565 1277112 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AB - In this paper, a silicon mold, with spherical/aspherical concave microlens arrays, was made by using ICP dry etching technique. A PMMA microlens was molded by using this mold and then tested by SEM, Dektakprofiler and etc.

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KW - Microlens array

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T3 - Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

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PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003

Y2 - 15 December 2003 through 19 December 2003

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Chen RL, Wang CM, Chang JY. Fabricating a silicon microlens mold by ICP dry etching. In CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc. 2003. p. 565. 1277112. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). doi: 10.1109/CLEOPR.2003.1277112

Fabricating a silicon microlens mold by ICP dry etching

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Keywords

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