Experimental investigation of a flowing fluid layer on metal surface roughness measurement and aberration correction using adaptive optics

Yiin Kuen Fuh, Jia Ren Fan

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

The induced optical aberration of laser beam passing through a transparent flowing fluid layer on a metal specimen is experimentally and empirical formula studied. The proposed study presents an experimental investigation of metal surface roughness measurement by combining an optical probe of laser-scattering phenomena and adaptive optics (AO) for aberration correction. In the absence of the AO correction scheme, induced flow velocity of 0.278 m/s can severely degrade the residual wavefront root mean square (RMS) error to 0.58 μm and decrease the scattered laser intensity. Real-time AO correction in closed-loop at a sampling rate of 8Hz can reduce the wavefront RMS error to 0.19 μm and improve the attenuation of scattered laser intensity. The maximum relative error of the estimated roughness (R a) is less than 7.8% compared with the stylus method. The experimental results show satisfactory correction in the presence of a flowing fluid layer using the AO system.

Original languageEnglish
Pages (from-to)433-437
Number of pages5
JournalOptical Review
Volume20
Issue number5
DOIs
StatePublished - Sep 2013

Keywords

  • adaptive optics
  • scattering
  • surface roughness

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