Excimer laser induced heating, melting, and mass diffusion in crystal silicon in nanosecond and nanometer scale

X. Zhang, J. R. Ho, Constantine P. Grigoropoulos

Research output: Contribution to journal › Conference article › peer-review

Fingerprint

Dive into the research topics of 'Excimer laser induced heating, melting, and mass diffusion in crystal silicon in nanosecond and nanometer scale'. Together they form a unique fingerprint.

Keyphrases

Engineering