Evidence of charged interface states limited scattering in GaN heterostructures

Indraneel Sanyal, Yu Chih Chen, Chuan Yue Yu, Jen Inn Chyi

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This study provides experimental evidence of charged interface states limited scattering in III-nitride heterostructures. Temperature-dependent Hall measurements and temperature-dependent ID-VG measurements indicate a significant influence of the charged interface states on the electron mobility in different AlGaN/GaN heterostructures where the characteristic of the interface is controlled by modulating the growth conditions. Charged interface states at the AlGaN/GaN heterointerface lead to electron scattering as the distance between the centroid of the two-dimensional electron gas and the interface decreases with increasing electron density. It is observed that a component of experimental Hall mobility, which ranges between 9.2 × 103 and 3.4 × 104 cm2/V s among the three samples, obtained after adding all the scattering events using Matthiessen's rule cannot be explained completely by considering all the conventional scattering mechanisms such as phonon-phonon scattering, interface roughness scattering, and dislocation density scattering. An in-depth analysis reveals a significant scattering of channel electrons by the charged states at the GaN/AlN/AlGaN interface. Furthermore, the estimated interface states from the temperature-dependent subthreshold slopes conducted on the fabricated high electron mobility transistors are in good agreement with the charged interface states extracted from the temperature-dependent Hall measurements. A good understanding on this new scattering mechanism in the GaN heterostructure may help in designing high-performance III-nitride devices in the future.

Original languageEnglish
Article number085702
JournalJournal of Applied Physics
Issue number8
StatePublished - 28 Aug 2023


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