Enhancement of NiSi-based nanocrystal formation by incorporating Ge elements for nonvolatile memory devices

Chih Wei Hu, Ting Chang Chang, Chun Hao Tu, Cheng Neng Chiang, Chao Cheng Lin, Sheng Wei Lee, Chun Yen Chang, Simon M. Sze, Tseung Yuen Tseng

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Engineering & Materials Science

Chemical Compounds