Enhanced growth of low-resistivity titanium silicides on epitaxial Si 0.7Ge0.3 on (001)Si with a sacrificial amorphous Si interlayer

W. W. Wu, C. W. Wang, K. N. Chen, S. L. Cheng, S. W. Lee

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

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Medicine and Dentistry