Enhanced formation of periodic arrays of low-resistivity NiSi nanocontacts on (0 0 1)Si 0.7 Ge 0.3 by nanosphere lithography with a thin interposing Si layer

S. L. Cheng, C. Y. Zhan, S. W. Lee, H. Chen

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

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Material Science