Energy-Efficient Monolithic 3-D SRAM Cell with BEOL MoS2FETs for SoC Scaling

Vita Pi Ho Hu, Cheng Wei Su, Yen Wei Lee, Tun Yi Ho, Chao Ching Cheng, Tzu Chiang Chen, Terry Yi Tse Hung, Jin Fu Li, Yu Guang Chen, Lain Jong Li

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Engineering & Materials Science

Chemical Compounds