Electrochemical etching of Si(001) in NH4F solutions: Initial stage and {111} microfacet formation

Shueh Lin Yau, Kazutoshi Kaji, Kingo Itaya

Research output: Contribution to journalArticlepeer-review

50 Scopus citations

Fingerprint

Dive into the research topics of 'Electrochemical etching of Si(001) in NH4F solutions: Initial stage and {111} microfacet formation'. Together they form a unique fingerprint.

Physics & Astronomy