Fingerprint
Dive into the research topics of 'Electrochemical etching of Si(001) in NH4F solutions: Initial stage and {111} microfacet formation'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Electrochemical etching of Si(001) in NH4F solutions: Initial stage and {111} microfacet formation
Shueh Lin Yau, Kazutoshi Kaji, Kingo Itaya
Research output: Contribution to journal › Article › peer-review
50
Scopus
citations