Electro-chromic device with GZO as a conductive layer

Chih Chao Chan, Chien Jen Tang, Kun Hsien Lee, Cheng Chung Jaing, Chien Cheng Kuo, Hsi Chao Chen, Cheng Chung Lee

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

Thin films of tungsten oxide (WO3) were deposited on GZO-coated B270 glass substrates and thin films of Ta2O5 were deposited on B270 glass substrates by electron beam gun evaporation at high vacuum pressure of 3×10-5 Torr and varied oxygen pressures ranging from 1.0×10-4 to 6.0×10-4 Torr. The optical properties of the electro-chromic (EC) film were measured by a spectrophotometer. The optical modulation (ΔT) of the tungsten oxide thin film deposited at an oxygen pressure of 1.0×10-4 Torr was found to be ΔT = 67.46% at λ=550nm. The optimum optical properties for deposition of Ta2O5 were attained at an oxygen pressure of 4x10-4 Torr. Gallium doped zinc oxide (GZO) was used as a conductive layer instead of ITO. A five layer EC device (Glass/GZO/WO3/Ta 2O5/NiO/Al) has been design and fabricated.

Original languageEnglish
Title of host publicationCurrent Developments in Lens Design and Optical Engineering XI; and Advances in Thin Film Coatings VI
DOIs
StatePublished - 2010
EventCurrent Developments in Lens Design and Optical Engineering XI; and Advances in Thin Film Coatings VI - San Diego, CA, United States
Duration: 1 Aug 20103 Aug 2010

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7786
ISSN (Print)0277-786X

Conference

ConferenceCurrent Developments in Lens Design and Optical Engineering XI; and Advances in Thin Film Coatings VI
Country/TerritoryUnited States
CitySan Diego, CA
Period1/08/103/08/10

Keywords

  • Electro-chromic devices
  • Optical modulation
  • Transparent conducting oxide
  • Tungsten oxide

Fingerprint

Dive into the research topics of 'Electro-chromic device with GZO as a conductive layer'. Together they form a unique fingerprint.

Cite this