Electrical and photonic characteristics of Indium-Gallium-Zinc-Oxide fabricated through the utilization of HiPIMS

Yi Nung Chao; Yuan Jie Lu; Sheng Hui Chen

doi:10.1364/IPRSN.2023.JTu4A.34

Electrical and photonic characteristics of Indium-Gallium-Zinc-Oxide fabricated through the utilization of HiPIMS

Yi Nung Chao, Yuan Jie Lu, Sheng Hui Chen

Department of Optics and Photonics

Research output: Contribution to conference › Paper › peer-review

Abstract

HiPIMS was utilized to produce Indium-Gallium-Zinc-Oxide (IGZO) films and evaluate their IR transmittance, resistivity, carrier mobility, and carrier concentration at various HiPIMS duty cycles and oxygen flux, in order to determine the optimal process parameters.

Original language	English
DOIs	https://doi.org/10.1364/IPRSN.2023.JTu4A.34
State	Published - 2023
Event	2023 Solar Energy and Light-Emitting Devices, SOLED 2023 in Advanced Photonics Congress 2023, Part of Advanced Photonics Congress 2023 - Busan, Korea, Republic of Duration: 9 Jul 2023 → 13 Jul 2023

Conference

Conference	2023 Solar Energy and Light-Emitting Devices, SOLED 2023 in Advanced Photonics Congress 2023, Part of Advanced Photonics Congress 2023
Country/Territory	Korea, Republic of
City	Busan
Period	9/07/23 → 13/07/23

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10.1364/IPRSN.2023.JTu4A.34

Cite this

Chao, Y. N., Lu, Y. J., & Chen, S. H. (2023). Electrical and photonic characteristics of Indium-Gallium-Zinc-Oxide fabricated through the utilization of HiPIMS. Paper presented at 2023 Solar Energy and Light-Emitting Devices, SOLED 2023 in Advanced Photonics Congress 2023, Part of Advanced Photonics Congress 2023, Busan, Korea, Republic of. https://doi.org/10.1364/IPRSN.2023.JTu4A.34

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title = "Electrical and photonic characteristics of Indium-Gallium-Zinc-Oxide fabricated through the utilization of HiPIMS",

abstract = "HiPIMS was utilized to produce Indium-Gallium-Zinc-Oxide (IGZO) films and evaluate their IR transmittance, resistivity, carrier mobility, and carrier concentration at various HiPIMS duty cycles and oxygen flux, in order to determine the optimal process parameters.",

author = "Chao, {Yi Nung} and Lu, {Yuan Jie} and Chen, {Sheng Hui}",

note = "Publisher Copyright: {\textcopyright} 2023 The Author (s).; 2023 Solar Energy and Light-Emitting Devices, SOLED 2023 in Advanced Photonics Congress 2023, Part of Advanced Photonics Congress 2023 ; Conference date: 09-07-2023 Through 13-07-2023",

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Chao, YN, Lu, YJ & Chen, SH 2023, 'Electrical and photonic characteristics of Indium-Gallium-Zinc-Oxide fabricated through the utilization of HiPIMS', Paper presented at 2023 Solar Energy and Light-Emitting Devices, SOLED 2023 in Advanced Photonics Congress 2023, Part of Advanced Photonics Congress 2023, Busan, Korea, Republic of, 9/07/23 - 13/07/23. https://doi.org/10.1364/IPRSN.2023.JTu4A.34

Electrical and photonic characteristics of Indium-Gallium-Zinc-Oxide fabricated through the utilization of HiPIMS. / Chao, Yi Nung; Lu, Yuan Jie; Chen, Sheng Hui.
2023. Paper presented at 2023 Solar Energy and Light-Emitting Devices, SOLED 2023 in Advanced Photonics Congress 2023, Part of Advanced Photonics Congress 2023, Busan, Korea, Republic of.

Research output: Contribution to conference › Paper › peer-review

TY - CONF

T1 - Electrical and photonic characteristics of Indium-Gallium-Zinc-Oxide fabricated through the utilization of HiPIMS

AU - Chao, Yi Nung

AU - Lu, Yuan Jie

AU - Chen, Sheng Hui

PY - 2023

Y1 - 2023

N2 - HiPIMS was utilized to produce Indium-Gallium-Zinc-Oxide (IGZO) films and evaluate their IR transmittance, resistivity, carrier mobility, and carrier concentration at various HiPIMS duty cycles and oxygen flux, in order to determine the optimal process parameters.

AB - HiPIMS was utilized to produce Indium-Gallium-Zinc-Oxide (IGZO) films and evaluate their IR transmittance, resistivity, carrier mobility, and carrier concentration at various HiPIMS duty cycles and oxygen flux, in order to determine the optimal process parameters.

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U2 - 10.1364/IPRSN.2023.JTu4A.34

DO - 10.1364/IPRSN.2023.JTu4A.34

M3 - 會議論文

AN - SCOPUS:85193079105

T2 - 2023 Solar Energy and Light-Emitting Devices, SOLED 2023 in Advanced Photonics Congress 2023, Part of Advanced Photonics Congress 2023

Y2 - 9 July 2023 through 13 July 2023

ER -

Electrical and photonic characteristics of Indium-Gallium-Zinc-Oxide fabricated through the utilization of HiPIMS

Abstract

Conference

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