Eight-phase-level diffractive microlens for beam splitting using LIGA-lIke Process

Jauh Jung Yang, Yunn Shiuan Liao, Chi Feng Chen

Research output: Contribution to journalArticlepeer-review


An eight-level diffractive microlens (DML) array for beam splitting is designed and fabricated by a LIGA-like process. The pattern of this dual-focal-point DML was designed using the optimal rotation-angle method and realized by silicon etching, nickel (Ni) electroplating and hot embossing. Tetraethoxysilane (TEOS) oxide etching and specially designed demold techniques were developed and employed in the fabrication process to minimize the related processing errors such as misalignment and tilting so that the accuracy of DML could be ensured. The obtained poly(methyl methacrylate) (PMMA)-based DML was measured to confirm the optical properties and the results showed that the diffraction efficiency error and uniformity error were successfully kept under 5.19 and 1.52%, respectively.

Original languageEnglish
Pages (from-to)2817-2823
Number of pages7
JournalJapanese Journal of Applied Physics
Issue number4 A
StatePublished - 7 Apr 2006


  • Beam splitting
  • Diffraction efficiency
  • Diffraction microlens
  • Hot embossing
  • LIGA fabrication
  • LIGA-like fabrication


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