Effects of stress on the growth of TiSi2 thin films on (001)Si

S. L. Cheng, H. Y. Huang, Y. C. Peng, L. J. Chen, B. Y. Tsui, C. J. Tsai, S. S. Guo

Research output: Contribution to journalArticlepeer-review

19 Scopus citations

Fingerprint

Dive into the research topics of 'Effects of stress on the growth of TiSi2 thin films on (001)Si'. Together they form a unique fingerprint.

Physics & Astronomy