Effects of silicon nanostructure morphology at different metal catalyst layer thicknesses in Metal-assisted etching

Chia Wen Tsao, Chia Pin Chang

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

A fast and simple approach to create silicon nanostructures using metal-assisted etching is reported. Effect of catalyst metal layer thickness on silicon nanostructure morphology was investigated in this study. Au and Ag with thickness of 3 nm, 5 nm and 10 nm were used as the metal catalyst layers to study the effects of metal catalyst thickness on silicon nanostructure morphology. The experimental results show that metal catalyst layer thicknesses have a significant influence on the silicon nanostructure morphology, such that the silicon nanostructures transform from random, disordered porous silicon surfaces into silicon nanowire or nanofilament nanostructures with increasing metal layer thickness for both gold and silver.

Original languageEnglish
Title of host publicationNEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Pages1220-1223
Number of pages4
DOIs
StatePublished - 2011
Event6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011 - Kaohsiung, Taiwan
Duration: 20 Feb 201123 Feb 2011

Publication series

NameNEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Conference

Conference6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011
Country/TerritoryTaiwan
CityKaohsiung
Period20/02/1123/02/11

Keywords

  • metal catalysis layer
  • metal-assisted etching
  • nanofilament silicon
  • porous silicon
  • Silicon nanostructure
  • silicon nanowire

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