Abstract
The effects of illumination during anodic etching of porous Si have been studied. For a fixed current density and anodization time, it has been observed that below a critical irradiance level, increasing the radiant flux density during anodization results in higher photoluminescence and a blue shift of the photoluminescence spectra. For irradiance above the critical value, the photoluminescence intensity decreases. Transmission Fourier-transform infrared spectroscopy, x-ray photoelectron spectroscopy and atomic force microscopy have been employed to investigate the effects of illumination on the characteristics of porous Si.
Original language | English |
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Pages (from-to) | 995-1000 |
Number of pages | 6 |
Journal | Journal of Electronic Materials |
Volume | 21 |
Issue number | 10 |
DOIs | |
State | Published - Oct 1992 |
Keywords
- illumination effect
- photoluminescence
- Porous Si