Effects of finger width on large-area InGaAs MSM photodetectors

R. H. Yuang, J. I. Chyi

Research output: Contribution to journalArticlepeer-review

12 Scopus citations


The authors show that the capacitance of the metal-semiconductor-metal photodetector call be minimised by using a very small or large finger width, with emphasis on the application for the large-area detector. Taking the quantum efficiency into account, the optimum sensitivity of the detector is obtained for the MSM-PD with very slim fingers.

Original languageEnglish
Pages (from-to)131-132
Number of pages2
JournalElectronics Letters
Issue number2
StatePublished - 18 Jan 1996


  • Metal-semiconductor-metal structures
  • Photodetectors


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