Effects of crystal-crucible iso-rotation and a balanced/unbalanced cusp magnetic field on the heat, flow, and oxygen transport in a Czochralski silicon melt

Thi Hoai Thu Nguyen, Jyh Chen Chen, Chieh Hu, Chun Hung Chen

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

1 Finished

1 results

Finished
Numerical Investigations of Impurity Transport Control during the Single Silicon Crystal Growth Process by Czochralski Method(2/2)
Chen, J.
1/08/19 → 31/07/20
Project: Research