Effect of the hydrogen concentration on the growth mechanism of sputtered hydrogenated silicon thin films

Hung Ju Lin, Sheng Hui Chen

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Fingerprint

Dive into the research topics of 'Effect of the hydrogen concentration on the growth mechanism of sputtered hydrogenated silicon thin films'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds