Effect of substrate biasing on the epitaxial growth and structural properties of rf magnetron sputtered germanium buffer layer on silicon

Gui Sheng Zeng, Chi Lung Liu, Sheng Hui Chen

Department of Optics and Photonics

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

2 results

Finished
Caac Sputtering Epi Technology for the Application of the Flexible Thin-Film Devices(2/3)
Chen, S.-H. (PI)
1/08/21 → 31/07/22
Project: Research
低維度新穎材料、晶圓級製程與關鍵技術整合於建構前瞻半導體元件之研究-低維度新穎材料、晶圓級製程與關鍵技術整合於建構前瞻半導體元件之研究(1/2)
Su, C.-Y. (PI)
1/05/21 → 31/07/22
Project: Research