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Effect of rotationally moving surface on roughness measurement of sputtered Pt film with close-loop correction using adaptive optics

  • Yiin Kuen Fuh
  • , Chia He Wang
  • , Chieh Tse Huang
  • , Pin Wen Chen
  • , Zheng Hong Lai

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

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