Effect of annealing on morphology, optical reflectivity, and stress state of Al-(0.19-0.53) wt.% Sc thin films prepared by magnetron sputtering

Jing Chie Lin, Hsueh Lung Liao, Wern Dare Jehng, Chun An Tseng, Jian Jhong Shen, Sheng Long Lee

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

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