Double corner cube method for enhancing the sensitivity of straightness measurement

Tung Shiuan Pan, Ju Yi Lee, Szu Wei Wu, Hung Lin Hsieh, Cheng Chih Hsu

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

A method of straightness measurement utilizing two corner cubes is proposed. The architectural design of the system leads to the magnification of the displacement of a light spot on the detector with the same offset of the determinand. This method enhances the sensitivity of the system and raises the precision to about 5 μm.

Original languageEnglish
Title of host publication2012 Proceedings of SICE Annual Conference, SICE 2012
PublisherSociety of Instrument and Control Engineers (SICE)
Pages1010-1013
Number of pages4
ISBN (Print)9781467322591
StatePublished - 2012
Event2012 51st Annual Conference on of the Society of Instrument and Control Engineers of Japan, SICE 2012 - Akita, Japan
Duration: 20 Aug 201223 Aug 2012

Publication series

NameProceedings of the SICE Annual Conference

Conference

Conference2012 51st Annual Conference on of the Society of Instrument and Control Engineers of Japan, SICE 2012
Country/TerritoryJapan
CityAkita
Period20/08/1223/08/12

Keywords

  • corner cube
  • quadrant detector
  • straightness

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