Dispersion Engineering of Silicon Nitride Microresonators via Reconstructable SU-8 Polymer Cladding

Shang Pu Wang, Tien Hsiang Lee, You Yuan Chen, Pei Hsun Wang

Research output: Contribution to journalArticlepeer-review

Abstract

In this work, we propose a novel way to flexibly engineer the waveguide dispersion by pat-terning the cladding of waveguide microresonators. Experimentally, we demonstrate silicon nitride waveguides with air-, oxide-, and SU-8 polymer-cladding layers and compare the corresponding waveguide dispersion. By integrating SU-8 polymer as the outer cladding layer, the waveguide dispersion can be tuned from −143 to −257 ps/nm/km. Through the simple, conventional polymer stripping process, we reconstruct the waveguide dispersion back to that of the original air-cladded device without significantly impacting the quality factor of resonators. This work provides the potential to design the waveguide dispersion in normal and anomalous regimes within an integrated photonic circuit.

Original languageEnglish
Article number454
JournalMicromachines
Volume13
Issue number3
DOIs
StatePublished - Mar 2022

Keywords

  • dispersion engineering
  • group velocity dispersion
  • microresonator
  • optical waveguide
  • reconstructable cladding layer

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