TY - JOUR
T1 - Direct-write, microfiber-based template for pattern transfer of aligned metallic microwires
AU - Fuh, Yiin Kuen
AU - Lu, Hong Yi
N1 - Publisher Copyright:
© 2014 Society of Photo-Optical Instrumentation Engineers (SPIE). © 2014 SPIE.
PY - 2014/10/1
Y1 - 2014/10/1
N2 - We have demonstrated a fiber-based template process for fabricating site-specific and highly aligned platinum (Pt) microwires (MWs) with a polymeric core utilizing near-filed electrospinning (NFES) and soft transferring technology. Eliminating the indispensably expensive submicron lithographic and metal catalyst/lift-off as well as the extensive etching processes, the proposed method is direct-write, lithography-free, and low cost. As a demonstration, Pt sputtering deposition on top of a 500-?m length of microfibers for 5?10?15 min is sufficient to produce highly conductible Pt MWs with a sheet resistance measured to be 1.46?1.09?0.83 kω?sq, with good adhesion between the sputtered MWs and the underlying layers. The measured total resistances were found to increase almost linearly with the length of the MWs and are comparatively more conductive than polypyrrole films. Furthermore, the reliable and repeatable nanofiber arrays can be speedily fabricated, while various patterns and dimensions are predominantly controllable by NFES in a direct-write, addressable manner.
AB - We have demonstrated a fiber-based template process for fabricating site-specific and highly aligned platinum (Pt) microwires (MWs) with a polymeric core utilizing near-filed electrospinning (NFES) and soft transferring technology. Eliminating the indispensably expensive submicron lithographic and metal catalyst/lift-off as well as the extensive etching processes, the proposed method is direct-write, lithography-free, and low cost. As a demonstration, Pt sputtering deposition on top of a 500-?m length of microfibers for 5?10?15 min is sufficient to produce highly conductible Pt MWs with a sheet resistance measured to be 1.46?1.09?0.83 kω?sq, with good adhesion between the sputtered MWs and the underlying layers. The measured total resistances were found to increase almost linearly with the length of the MWs and are comparatively more conductive than polypyrrole films. Furthermore, the reliable and repeatable nanofiber arrays can be speedily fabricated, while various patterns and dimensions are predominantly controllable by NFES in a direct-write, addressable manner.
KW - near-filed electrospinning
KW - polyvinylidene fluoride
KW - Pt-coated
KW - soft transferring
UR - http://www.scopus.com/inward/record.url?scp=84920612454&partnerID=8YFLogxK
U2 - 10.1117/1.JMM.13.4.043014
DO - 10.1117/1.JMM.13.4.043014
M3 - 期刊論文
AN - SCOPUS:84920612454
SN - 1932-5150
VL - 13
JO - Journal of Micro/Nanolithography, MEMS, and MOEMS
JF - Journal of Micro/Nanolithography, MEMS, and MOEMS
IS - 4
M1 - 043014
ER -