Fingerprint
Dive into the research topics of 'Direct patterning on low dielectric constant materials with electron beam lithography'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Ben Chang Chen, Yee Kai Lai, Fu Hsiang Ko, Cheng Tung Chou, Hsuen Li Chen
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review