The depth resolution of conventional confocal microscopy is limited by the numerical aperture to about 0.5 μm. This paper reports development of a new confocal technique, tentatively called differential confocal microscopy, which can be used to image and profile surface microstructures with depth resolution on the order of 10 nm.
|Number of pages||1|
|Journal||Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS|
|State||Published - 1996|
|Event||Proceedings of the 1996 Conference on Lasers and Electro-Optics, CLEO'96 - Anaheim, CA, USA|
Duration: 2 Jun 1996 → 7 Jun 1996