Abstract
The depth resolution of conventional confocal microscopy is limited by the numerical aperture to about 0.5 μm. This paper reports development of a new confocal technique, tentatively called differential confocal microscopy, which can be used to image and profile surface microstructures with depth resolution on the order of 10 nm.
Original language | English |
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Pages (from-to) | 430 |
Number of pages | 1 |
Journal | Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS |
State | Published - 1996 |
Event | Proceedings of the 1996 Conference on Lasers and Electro-Optics, CLEO'96 - Anaheim, CA, USA Duration: 2 Jun 1996 → 7 Jun 1996 |