Differential confocal microscopy with nanometer depth resolution

Chau Hwang Lee, Jyhpyng Wang

Research output: Contribution to journalConference articlepeer-review


The depth resolution of conventional confocal microscopy is limited by the numerical aperture to about 0.5 μm. This paper reports development of a new confocal technique, tentatively called differential confocal microscopy, which can be used to image and profile surface microstructures with depth resolution on the order of 10 nm.

Original languageEnglish
Pages (from-to)430
Number of pages1
JournalConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
StatePublished - 1996
EventProceedings of the 1996 Conference on Lasers and Electro-Optics, CLEO'96 - Anaheim, CA, USA
Duration: 2 Jun 19967 Jun 1996


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