A facile low-temperature synthesis process, including the first electrodeposition and the second hydrothermal reaction, has been adopted in fabricating the Li-Mn-O thin-film probe to measure the localized electrochemical impedance of the solid-state electrolyte LiPON. The synthesized thin film is uniformly and densely deposited on the probe, which is composed of layered Li2MnO3 and LiMnO2 crystalline phases. In addition to surface topography mapping, using the thin-film probe allows us to discern the dominant charge transfer resistance at the LiPON/Li-Mn-O interface from the electrolyte resistance in nanoscale level, which is different from the results obtained by a conductive probe as well as a MIM cell. It is also found by the thin-film probe that the ion transport in LiPON and charge transfer behavior at the LiPON/Li-Mn-O interface can be facilitated by introducing an external voltage.
- Hydrothermal reaction
- Localized impedance microscopy
- Solid-state electrolyte
- Thin films