@inproceedings{02b78f5352ea4f71a12e27aa48f1d922,
title = "Development of CMOS MEMS thermal bimorph actuator for driving microlens",
abstract = "A CMOS MEMS based thermal actuator is developed by using bimorph with embedded SiO2 and inverted-connected metal line adopted from CMOS materials. Vertical displacement of 47μm and power consumption of 139mW is obtained at 3Vdc.",
keywords = "Microlens, Optical Microelectromechanical Systems, Thermal Actuator",
author = "Koh, {Kah How} and Chengkuo Lee and Lu, {Jyun Hong} and Chen, {Chii Chang}",
year = "2011",
doi = "10.1109/OMEMS.2011.6031057",
language = "???core.languages.en_GB???",
isbn = "9781457703362",
series = "International Conference on Optical MEMS and Nanophotonics",
pages = "153--154",
booktitle = "Proceedings - OMN2011",
note = "16th International Conference on Optical MEMS and Nanophotonics, OMN2011 ; Conference date: 08-08-2011 Through 11-08-2011",
}