Development of CMOS MEMS thermal bimorph actuator for driving microlens

Kah How Koh, Chengkuo Lee, Jyun Hong Lu, Chii Chang Chen

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

6 Scopus citations

Abstract

A CMOS MEMS based thermal actuator is developed by using bimorph with embedded SiO2 and inverted-connected metal line adopted from CMOS materials. Vertical displacement of 47μm and power consumption of 139mW is obtained at 3Vdc.

Original languageEnglish
Title of host publicationProceedings - OMN2011
Subtitle of host publication16th International Conference on Optical MEMS and Nanophotonics
Pages153-154
Number of pages2
DOIs
StatePublished - 2011
Event16th International Conference on Optical MEMS and Nanophotonics, OMN2011 - Istanbul, Turkey
Duration: 8 Aug 201111 Aug 2011

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Conference

Conference16th International Conference on Optical MEMS and Nanophotonics, OMN2011
Country/TerritoryTurkey
CityIstanbul
Period8/08/1111/08/11

Keywords

  • Microlens
  • Optical Microelectromechanical Systems
  • Thermal Actuator

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