Development of a hydrogen gas sensor using microfabrication technology

Chung Chiun Liu, Qinghai Wu, Matthew Stuczynski, George C. Madzsar

Research output: Contribution to journalConference articlepeer-review


In recent years, microelectronic fabrication techniques such as photolithographic reduction, thick and thin film and reactive sputtering metallization, chemical and plasma etching, etc. have been applied to the production of miniature and microsize chemical sensors. The introduction of solid electrolytes and conductive polymers further enhances the applicability of electrochemical and chemical sensors, particularly in a gaseous environment. Recent advances in micromachining technology also add new dimensions to the development of chemical sensors.

Original languageEnglish
JournalSAE Technical Papers
StatePublished - 1992
Event22nd International Conference on Environmental Systems - Seattle, WA, United States
Duration: 13 Jul 199216 Jul 1992


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