Development of a computer generation holography for generating square matrix light spots applied to the laser patterning system

Jyh Rou Sze, An Chi Wei

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

A computer generation holography (CGH) is proposed herein to synthesize square-matrix light spots. Such a design of CGH is possible by reducing the 2-D problem to two 1-D problems. The both 1-D CGHs are designed with the conjugate-gradient method and verified with the Fresnel-Kirchhoff diffraction theory. This quantized 8-levels CGH is fabricated by using optical contact lithography and reactive-ion etching techniques. Measurement demonstrates that the fabricated CGH has the desired optical function, i.e., it forms square-matrix light spots in the image plane at a distance of 40 mm from the CGH. The developed CGH can be applied to the laser patterning system by optical projection and direct etching.

Original languageEnglish
Title of host publicationRecent Development in Machining, Materials and Mechanical Technologies
EditorsJyh-Chen Chen, Usuki Hiroshi, Sheng-Wei Lee, Yiin-Kuen Fuh
PublisherTrans Tech Publications Ltd
Pages509-514
Number of pages6
ISBN (Print)9783038354956
DOIs
StatePublished - 2015
EventInternational Conference on Machining, Materials and Mechanical Technologies, IC3MT 2014 - Taipei City, Taiwan
Duration: 31 Aug 20145 Sep 2014

Publication series

NameKey Engineering Materials
Volume656-657
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Conference

ConferenceInternational Conference on Machining, Materials and Mechanical Technologies, IC3MT 2014
Country/TerritoryTaiwan
CityTaipei City
Period31/08/145/09/14

Keywords

  • Computer generation holography
  • Laser patterning system
  • Square matrix light spots

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