Determination of the mechanical properties of thin films by digital phase shifting interferometry

Keyphrases

• Mechanical Properties of Thin Films 100%
• Phase-shifting Interferometry 100%
• Ion Beam Sputtering 50%
• Interferometric Techniques 50%
• Mechanical Properties 50%
• Temperature Effect 50%
• Coefficient of Thermal Expansion 50%
• Deflection 50%
• Deposited Film 50%
• Oxide Film 50%
• Image Processing Techniques 50%
• Coated Substrate 50%
• Ion Source 50%
• Zernike Polynomial Fitting 50%
• Stress Measurement 50%
• Internal Stress 50%
• Polynomial Coefficients 50%
• Contour Plots 50%
• Phase Mapping 50%
• Thin Oxide Films 50%
• Polynomial Fitting Algorithm 50%

Engineering

• Thin Films 100%
• Interferometry 100%
• Oxide Film 100%
• Image Processing 50%
• Temperature Dependence 50%
• Processing Technique 50%
• Deposited Film 50%
• Coefficient of Thermal Expansion 50%
• Internal Stress 50%
• Ion Source 50%
• Contour Plot 50%
• Interferometric Method 50%

Material Science

• Thin Films 100%
• Oxide Film 100%
• Film 50%
• Thermal Expansion 50%
• Stress Measurement 50%
• Sputter Deposition 50%