Design of GaN convex diffractive microlenses

Chii Chang Chen, Jenq Yang Chang, Gou Chung Chi

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Abstract

In this work, convex diffractive microlenses are designed for fabrication in GaN-based material with a gray-level mask. The aspect ratios of the surface relief of plano-convex and double-convex microlenses for different numerical apertures are compared to reduce the fabrication difficulty. The results show that for the numerical aperture less than 0.6, the aspect ratio of the double-convex diffractive microlenses is around half of the plano-convex diffractive microlenses. For the numerical aperture higher than 0.6, the aspect ratio of the plano-convex diffractive microlenses is similar to the double-convex diffractive microlenses. The error of the surface relief of the microlens occurring during the fabrication process is also discussed.

Original languageEnglish
Pages (from-to)569-573
Number of pages5
JournalOptics and Laser Technology
Volume34
Issue number7
DOIs
StatePublished - Oct 2002

Keywords

  • Diffractive optical elements
  • GaN
  • Microlenses
  • MOEMS
  • Optical data storage
  • Optical MEMS

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