Surface plasmon resonance (SPR) is a phenomenon occurring on metal surfaces (typically gold and silver) when an incident light beam strikes the surface at a particular angle. The main aim here is to develop a theoretical model measuring the setup for nano-technologies, which can be used to fabricate Au nano-particles for possible SPR biosensing applications. MEMS (Micro-Electro-Mechanical Systems) technologies have recently provided a wide spectrum of new designs and fabrications for micro-sensors, micro-fluidic systems and micro-systems. Among the driving forces behind the continuous growth, biomedical application is one of the biggest identified market sectors. This paper will discuss the design and fabrication of a chip-type SPR sensor which can be used to monitor biomolecular interactions.