Design and modeling of nanophotonic beam structures as optical NEMS sensors

Chengkuo Lee, Jayaraj Thillaigovindan, Aibin Yu, Rohit Radhakrishnan, Chii Chang Chen, Ya Ting Chao, John H. Lau

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


Silicon photonic crystal (PhC) waveguide based resonator is designed by introducing a micro-cavity within the line defect so as to form the resonant band gap structure for PhC. Free-standing silicon beam comprising this nanophotonic resonator structure is investigated. The output resonant wavelength is sensitive to the shape of air holes and defect length of the micro-cavity. The resonant wavelength shift in the output spectrum is a function of force loading at the center of a suspended beam with PhC waveguide resonator. The sensing capability of this new nanomechanical sensor is derived as that vertical deformation is about 20nm at center and the smallest strain is 0.005% for defect length.

Original languageEnglish
Title of host publicationQuantum Sensing and Nanophotonic Devices V
StatePublished - 2008
EventQuantum Sensing and Nanophotonic Devices V - San Jose, CA, United States
Duration: 20 Jan 200823 Jan 2008

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


ConferenceQuantum Sensing and Nanophotonic Devices V
Country/TerritoryUnited States
CitySan Jose, CA


  • MEMS
  • NEMS
  • Nanophotonics
  • Sensor


Dive into the research topics of 'Design and modeling of nanophotonic beam structures as optical NEMS sensors'. Together they form a unique fingerprint.

Cite this