Design and Implementation of Multi-mode Scanning Atomic Force Microscope

Jim Wei Wu, Jui Tse Weng, Shao An Chao, Wen Shan Cen, Yuan Chih Peng

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Atomic force microscope (AFM) is used to scan the topography of samples using a sharp probe; however, conventional AFM devices are limited by XY scanners based on piezoelectric actuation. This paper proposes a novel AFM system featuring multi-mode scanning via two high-precision positions called piezoelectric actuation positioner (PAP) and precision electromagnetic positioner (PEP). The 3 degrees of freedom (DOF) provided by the PAP and the 2 DOF provided by the PEP greatly enhances the flexibility of the scanning positioners, allowing operation in the following three modes: 1) Short-range scanning; 2) Long-range scanning; 3) Image-series scanning. Extensive experimentation demonstrated the feasibility of the proposed system.

Original languageEnglish
Title of host publication2021 International Automatic Control Conference, CACS 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781665444125
DOIs
StatePublished - 2021
Event2021 International Automatic Control Conference, CACS 2021 - Chiayi, Taiwan
Duration: 3 Nov 20216 Nov 2021

Publication series

Name2021 International Automatic Control Conference, CACS 2021

Conference

Conference2021 International Automatic Control Conference, CACS 2021
Country/TerritoryTaiwan
CityChiayi
Period3/11/216/11/21

Keywords

  • Atomic force microscope
  • Piezoelectric actuation positioner
  • Precision electromagnetic positioner

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