@inproceedings{afa838ee8abb460381d7a356a7b0e385,
title = "Design and Implementation of Multi-mode Scanning Atomic Force Microscope",
abstract = "Atomic force microscope (AFM) is used to scan the topography of samples using a sharp probe; however, conventional AFM devices are limited by XY scanners based on piezoelectric actuation. This paper proposes a novel AFM system featuring multi-mode scanning via two high-precision positions called piezoelectric actuation positioner (PAP) and precision electromagnetic positioner (PEP). The 3 degrees of freedom (DOF) provided by the PAP and the 2 DOF provided by the PEP greatly enhances the flexibility of the scanning positioners, allowing operation in the following three modes: 1) Short-range scanning; 2) Long-range scanning; 3) Image-series scanning. Extensive experimentation demonstrated the feasibility of the proposed system.",
keywords = "Atomic force microscope, Piezoelectric actuation positioner, Precision electromagnetic positioner",
author = "Wu, {Jim Wei} and Weng, {Jui Tse} and Chao, {Shao An} and Cen, {Wen Shan} and Peng, {Yuan Chih}",
note = "Publisher Copyright: {\textcopyright} 2021 IEEE; 2021 International Automatic Control Conference, CACS 2021 ; Conference date: 03-11-2021 Through 06-11-2021",
year = "2021",
doi = "10.1109/CACS52606.2021.9639049",
language = "???core.languages.en_GB???",
series = "2021 International Automatic Control Conference, CACS 2021",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2021 International Automatic Control Conference, CACS 2021",
}