Design and fabrication of Si-based pickup module for optical storage

Chien Chieh Lee, Chih Ming Wang, Jenq Yang Chang, Gou Chung Chi

Research output: Contribution to journalConference articlepeer-review


We have proposed a miniaturized optical signal pickup module comprised of several SiNx membrane devices on stacked Si substrates for use in optical storage system. The optical module was designed to include not only light sources and detectors, but also the diffractive optical elements (DOEs), which can be made with microoptoelectromechanical systems (MOEMS) technology. Its optical operation was simulated by ray-tracing to have an optimized spot size (∼0.6μm) focused on the disk with setting the tolerance of each element for the alignment. All these Si-based transmission optical elements were fabricated and can be stacked by self-alignment bonding for system assembly.

Original languageEnglish
Article number48
Pages (from-to)378-386
Number of pages9
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2004
EventNovel Optical Systems Design and Optimization VII - Denver, CO, United States
Duration: 2 Aug 20043 Aug 2004


  • Diffractive optical elements
  • Microoptoelectromechanical systems
  • Pickup module
  • SiN membrane


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