Design and fabrication of Si-based pickup module for optical storage

Chien Chieh Lee; Chih Ming Wang; Jenq Yang Chang; Gou Chung Chi

doi:10.1117/12.559258

Design and fabrication of Si-based pickup module for optical storage

Chien Chieh Lee, Chih Ming Wang, Jenq Yang Chang, Gou Chung Chi

Research output: Contribution to journal › Conference article › peer-review

Abstract

We have proposed a miniaturized optical signal pickup module comprised of several SiN_x membrane devices on stacked Si substrates for use in optical storage system. The optical module was designed to include not only light sources and detectors, but also the diffractive optical elements (DOEs), which can be made with microoptoelectromechanical systems (MOEMS) technology. Its optical operation was simulated by ray-tracing to have an optimized spot size (∼0.6μm) focused on the disk with setting the tolerance of each element for the alignment. All these Si-based transmission optical elements were fabricated and can be stacked by self-alignment bonding for system assembly.

Original language	English
Article number	48
Pages (from-to)	378-386
Number of pages	9
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5524
DOIs	https://doi.org/10.1117/12.559258
State	Published - 2004
Event	Novel Optical Systems Design and Optimization VII - Denver, CO, United States Duration: 2 Aug 2004 → 3 Aug 2004

Keywords

Diffractive optical elements
Microoptoelectromechanical systems
Pickup module
SiN membrane

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10.1117/12.559258

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@article{24d487472f08498c8b353d2400ce689b,

title = "Design and fabrication of Si-based pickup module for optical storage",

abstract = "We have proposed a miniaturized optical signal pickup module comprised of several SiNx membrane devices on stacked Si substrates for use in optical storage system. The optical module was designed to include not only light sources and detectors, but also the diffractive optical elements (DOEs), which can be made with microoptoelectromechanical systems (MOEMS) technology. Its optical operation was simulated by ray-tracing to have an optimized spot size (∼0.6μm) focused on the disk with setting the tolerance of each element for the alignment. All these Si-based transmission optical elements were fabricated and can be stacked by self-alignment bonding for system assembly.",

keywords = "Diffractive optical elements, Microoptoelectromechanical systems, Pickup module, SiN membrane",

author = "Lee, {Chien Chieh} and Wang, {Chih Ming} and Chang, {Jenq Yang} and Chi, {Gou Chung}",

year = "2004",

doi = "10.1117/12.559258",

language = "???core.languages.en_GB???",

volume = "5524",

pages = "378--386",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

note = "Novel Optical Systems Design and Optimization VII ; Conference date: 02-08-2004 Through 03-08-2004",

}

TY - JOUR

T1 - Design and fabrication of Si-based pickup module for optical storage

AU - Lee, Chien Chieh

AU - Wang, Chih Ming

AU - Chang, Jenq Yang

AU - Chi, Gou Chung

PY - 2004

Y1 - 2004

N2 - We have proposed a miniaturized optical signal pickup module comprised of several SiNx membrane devices on stacked Si substrates for use in optical storage system. The optical module was designed to include not only light sources and detectors, but also the diffractive optical elements (DOEs), which can be made with microoptoelectromechanical systems (MOEMS) technology. Its optical operation was simulated by ray-tracing to have an optimized spot size (∼0.6μm) focused on the disk with setting the tolerance of each element for the alignment. All these Si-based transmission optical elements were fabricated and can be stacked by self-alignment bonding for system assembly.

AB - We have proposed a miniaturized optical signal pickup module comprised of several SiNx membrane devices on stacked Si substrates for use in optical storage system. The optical module was designed to include not only light sources and detectors, but also the diffractive optical elements (DOEs), which can be made with microoptoelectromechanical systems (MOEMS) technology. Its optical operation was simulated by ray-tracing to have an optimized spot size (∼0.6μm) focused on the disk with setting the tolerance of each element for the alignment. All these Si-based transmission optical elements were fabricated and can be stacked by self-alignment bonding for system assembly.

KW - Diffractive optical elements

KW - Microoptoelectromechanical systems

KW - Pickup module

KW - SiN membrane

UR - http://www.scopus.com/inward/record.url?scp=13444261128&partnerID=8YFLogxK

U2 - 10.1117/12.559258

DO - 10.1117/12.559258

M3 - 會議論文

AN - SCOPUS:13444261128

SN - 0277-786X

VL - 5524

SP - 378

EP - 386

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

M1 - 48

T2 - Novel Optical Systems Design and Optimization VII

Y2 - 2 August 2004 through 3 August 2004

ER -

Design and fabrication of Si-based pickup module for optical storage

Abstract

Keywords

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